This vacuum chamber allows us to sublime materials in high vacuum (10^-6 mbar), which are deposited homogeneously as films into the desired substrates. This chamber is equipped with four evaporation sources (up to 800 °C) fitted with ceramic crucibles, independent controllers and shutters, hence four materials can be sublimed at the same time with a fine control of the individual deposited rates. A dedicated QCM sensor is installed above each source plus one close to the substrate for the overall deposition rate measurement. The chamber is integrated with a nitrogen glove box for samples transfer in inert atmosphere.